Dimensions
mm (inches)
Weight: 3.6 Kg (7.9 lbs)
Technologies
Interferometry
VSI
Light sources
550 nm
Objective performance
Interferometry
| MAG | 2.5X | 5X | 10X | 20X | 50X | 100X |
| NA | 0.075 | 0.13 | 0.30 | 0.40 | 0.55 | 0.70 |
| WD (mm) | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 |
| FOV1 (µm) | 4710.40 x 3532.80 | 2355.20 x 1766.40 | 1177.60 x 883.20 | 630 x 472 | 252 x 189 | 126 x 94 |
| Spatial sampling2 (µm) | 7.36 | 3.68 | 1.8 | 0.98 | 0.39 | 0.19 |
| Optical resolution3 (µm) | 7.88 | 3.94 | 1.97 | 0.98 | 0.39 | 0.24 |
| Measurement time4 (µm/s) | 25 | |||||
CSI
| System noise5 (nm) | 1 | |||||
| Maximum slope6 (º) | 3 | 8 | 14 | 21 | 25 | 42 |
Other objectives available: Variable reflectance | Michelson | Mirau | Linnik
1 Maximum field of view with 2/3” camera and 0.375X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution. Values for white LED. 4 Measurement speed 1X. 5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. 6 On smooth surfaces, up to 86º on rough surfaces.
Z performance
| Z | LINEAR SCALE |
| Vertical range | 40 mm (1.6″) |
| Linearity | <0.5 µm/mm |
| Resolution | 2 nm |
Repeatability
| Step height repeatability | <3 nm |
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