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Sensofar Confocal

Confocal profilers have been developed for measuring smooth to very rough surfaces. Confocal profiling provides the highest lateral resolution, up to 0.15 um line & space, with spatial sampling can be reduced to 0.01 μm, which is ideal for critical dimension measurements.

BACKGROUND

Confocal principle

Confocal technology is able to measure the surface height converting conventional images into optical sections where the signal is preserved for those areas within the depth of focus of the objective, improving the image contrast and the lateral resolution and system noise.

Confocal Image
Confocal Image
Background Confocal

OPTICAL SCHEME

For 3D imaging it is necessary to obtain data from all the pixels of the camera. That means: to reconstruct a confocal image. To do that, the multiple slit image is shifted one pixel as many times as necessary to fill the camera. In each of the shifted multiple slits, one image of the camera is taken and the confocal algorithm is applied on the pixels illuminated at that moment.

S neox Confocal Configuration
S neox patented internal configuration

SENSOFAR PATENTED

No moving parts in the optical set-up

The confocal scanning technique implemented in Sensofar’s systems is a Microdisplay Scan Confocal Microscope (according to ISO 25178 part 607). The microdisplay creates a rapidly switching device with no moving parts, making data acquisition fast, reliable and accurate. Due to this and the associated algorithms, Sensofar’s Confocal technique yields a class-leading vertical resolution, better than other Confocal approaches.

Read our related paper Confocal Fusion: Towards the universal optical 3D metrology technology

PROPRIETARY ALGORITHMS

Don’t stop me now! Continuous Confocal

Revolutionary step in Confocal measurement technology, steadily reducing the acquisition time by a factor of 3. Continuous Confocal mode avoids the discrete (and time-consuming) plane-by-plane acquisition of classical Confocal by simultaneously scanning in-plane and Z axis. Essential for reducing acquisition times for large area scans and large Z scans.

Continuous Confocal Algorithm
Banner Webinar Confocal
HDR Confocal

KEY FEATURES

Confocal profiling provides the highest lateral resolution, up to 0.15μm line & space, with spatial sampling can be reduced to 0.01 μm, which is ideal for critical dimension measurements. High NA (0.95) and magnification (150X) objectives are available to measure smooth surfaces with steep local slopes over 70° (for rough surfaces up to 86°).  

  Best lateral resolution: 300 nm (Rayleight criteria) 

  Slopes up to 70º for smooth surfaces and 86º for rough surfaces 

  Continuous confocal: speed comparable to AiFV 

  High repeatability, down to 1 nm system noise

  Thickness measurements from 1.5 μm to several mm 

  Highest level of flexibility

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Confocal systems

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