Technologies

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Confocal

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Interferometric
VSI

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Focus Variation

Light Source

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550nm

Dimensions

Objectives performance

Brightfield
MAG 2.5X 5X 10X 20X 50X 100X 150X
NA 0.075 0.15 0.30 0.45 0.80 0.90 0.95
WD (mm) 6.5 23.5 17.5 4.5 1.0 1.0 0.2
FOV1 (µm) 7016 x 5280 3508 x 2640 1754 x 1320 877 x 660 351 x 264 175 x 132 117 x 88
Spatial sampling2 (µm) 5.16 2.58 1.29 0.65 0.26 0.13 0.09
Optical resolution3 (µm) 2.23 1.11 0.55 0.37 0.21 0.18 0.17
Measurement time4 (s) >3

Confocal

Vertical resolution5 (nm) 75 25 8 3 2 1
Maximum slope6 (º) 8 14 21 42 51 71

Focus variation

Min. measurable roughness Sa > 10 nm
Maximum slope up to 86º

Other objectives available (Confocal / Focus Variation):
Water Immersion | Super Long Working Distance | Extra Long Working Distance | Collar Ring Depth Focusing Correction

1 Maximum field of view with 2/3” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED. Spatial sampling could limit the optical resolution for interferometric objectives.   4 For brightfield objectives, 21 scanning planes (confocal).   5 System noise measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis.   6 On smooth surfaces, up to 86º on rough surfaces.

Interferometric
MAG 5X 10X 20X 50X 100X
NA 0.13 0.30 0.40 0.55 0.70
WD (mm) 9.3 7.4 4.7 3.4 2.0
FOV1 (µm) 3508 x 2640 1754 x 1320 877 x 660 351 x 264 175 x 132
Spatial sampling2 (µm) 2.58 1.29 0.65 0.26 0.13
Optical resolution3 (µm) 2.58 1.29 0.65 0.25 0.20
Measurement time4 (s) >3

VSI

Vertical resolution5 (nm) 1
Maximum slope6 (º) 8 14 21 25 42

1 Maximum field of view with 2/3” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED. Spatial sampling could limit the optical resolution for interferometric objectives.   4 For interferometric objectives, 10µm scanning range.   5 System noise measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis.   6 On smooth surfaces, up to 86º on rough surfaces. 

Stage performance

Z LINEAR SCALE
Vertical range 40 mm (1.6″)
Linearity <0.5 µm/mm
Resolution 2 nm

Computer & Operating system

photoProduct_SlynxComputerDimensions
Computer HP Z230SSF
Screen HP27i 2560×1440 px
Operating System Microsoft Windows 10, 64-bits
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