Technologies
Confocal
Interferometric
VSI
VSI
Focus Variation
Light Source
550nm
Dimensions
Objectives performance
| MAG | 2.5X | 5X | 10X | 20X | 50X | 100X | 150X |
| NA | 0.075 | 0.15 | 0.30 | 0.45 | 0.80 | 0.90 | 0.95 |
| WD (mm) | 6.5 | 23.5 | 17.5 | 4.5 | 1.0 | 1.0 | 0.2 |
| FOV1 (µm) | 7016 x 5280 | 3508 x 2640 | 1754 x 1320 | 877 x 660 | 351 x 264 | 175 x 132 | 117 x 88 |
| Spatial sampling2 (µm) | 5.16 | 2.58 | 1.29 | 0.65 | 0.26 | 0.13 | 0.09 |
| Optical resolution3 (µm) | 2.23 | 1.11 | 0.55 | 0.37 | 0.21 | 0.18 | 0.17 |
| Measurement time4 (s) | >3 | ||||||
Confocal
| Vertical resolution5 (nm) | – | 75 | 25 | 8 | 3 | 2 | 1 |
| Maximum slope6 (º) | – | 8 | 14 | 21 | 42 | 51 | 71 |
Focus variation
| Min. measurable roughness | Sa > 10 nm |
| Maximum slope | up to 86º |
Other objectives available (Confocal / Focus Variation):
Water Immersion | Super Long Working Distance | Extra Long Working Distance | Collar Ring Depth Focusing Correction
1 Maximum field of view with 2/3” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED. Spatial sampling could limit the optical resolution for interferometric objectives. 4 For brightfield objectives, 21 scanning planes (confocal). 5 System noise measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. 6 On smooth surfaces, up to 86º on rough surfaces.
| MAG | 5X | 10X | 20X | 50X | 100X |
| NA | 0.13 | 0.30 | 0.40 | 0.55 | 0.70 |
| WD (mm) | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 |
| FOV1 (µm) | 3508 x 2640 | 1754 x 1320 | 877 x 660 | 351 x 264 | 175 x 132 |
| Spatial sampling2 (µm) | 2.58 | 1.29 | 0.65 | 0.26 | 0.13 |
| Optical resolution3 (µm) | 2.58 | 1.29 | 0.65 | 0.25 | 0.20 |
| Measurement time4 (s) | >3 | ||||
VSI
| Vertical resolution5 (nm) | 1 | ||||
| Maximum slope6 (º) | 8 | 14 | 21 | 25 | 42 |
1 Maximum field of view with 2/3” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED. Spatial sampling could limit the optical resolution for interferometric objectives. 4 For interferometric objectives, 10µm scanning range. 5 System noise measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. 6 On smooth surfaces, up to 86º on rough surfaces.
Stage performance
| Z | LINEAR SCALE |
| Vertical range | 40 mm (1.6″) |
| Linearity | <0.5 µm/mm |
| Resolution | 2 nm |
Computer & Operating system
| Computer | HP Z230SSF Screen HP27i 2560×1440 px |
| Operating System | Microsoft Windows 10, 64-bits |
Get answers to your questions!
Connect with an expert
Connect with an expert
Just write us an email or search for
a direct contact near you.
a direct contact near you.
Get answers to your questions!
Connect with an expert
Connect with an expert
Just write us an email or search for
a direct contact near you.
a direct contact near you.
