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Dimensions

mm (inches)
Weight: 5.3 Kg  (11.7 lbs)

S mart sensor dimensions

Light sources

icon_WhiteLight

550 nm

icon_BlueLight

459 nm

Objective lenses

Brightfield
MAG 2.5X 5X 10X 20X 50X 100X
NA 0.075 0.15 0.30 0.45 0.80 0.90
WD (mm) 6.50 20 15.8 3.0 1.0 2.00
FOV1 (µm) 5652 x 5652 2820 x 2820 1410 x 1410 700 x 700 280 x 280 141 x 141
Spatial sampling2 (µm) 5.52 2.76 1.38 0.69 0.27 0.07
Optical resolution3 (µm) 1.87 1.11 0.55 0.37 0.21 0.15
Measurement noise4 (nm) 350 120 45 10 4 3
Maximum slope5 (º) 4 9 17 27 53 64

1 Maximum field of view with 2/3” camera and 0.25X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED in brightfield objectives. 4 Measurement noise is measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment. 5 On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available.

Interferometry
MAG 2.5X 5X 10X 20X 50X 100X
NA 0.075 0.13 0.30 0.40 0.55 0.70
WD (mm) 10.30 9.30 7.4 4.7 3.4 2.00
FOV1 (µm) 5650 x 5650 2820 x 2820 1410 x 1410 700 x 700 280 x 280 140 x 140
Spatial sampling2 (µm) 5.52 2.76 1.38 0.69 0.13 0.07
Optical resolution3 (µm) 2.32 1.34 0.58 0.44 0.32 0.25
System noise4 (nm) < 5
Maximum slope5 (º) 4 7 17 24 33 44

1 Maximum field of view with 2/3” camera and 0.25X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for white LED in interferometric objectives. 4 Measurement noise is measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment. 5 On smooth surfaces.

Z performance

Z LINEAR STAGE
Vertical range 20 mm (0.79″)
Resolution 5 nm

Accuracy and repeatibility

STANDARD VALUE LINEAR SCANNER1 TECHNIQUE
Step Height (H) >10 U = 0.005 + H/50
σ < 10 nm
Confocal, AiFV
& CSI
<10 U = 0.120 + H/120
σ < 10 nm
Confocal, AiFV
& CSI

1 Values obtained in a VC-E vibration environment. Objective used for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI 50X 0.55NA. Resolution 1220×1024 pixels. Uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (level of confidence 95%). σ according to 25 measures. For steps smaller than 5 μm, σ < 5 nm.

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