Start typing and press Enter to search

This website does not support Internet Explorer. For a correct visualization we recommend to use Microsoft Edge or Google Chrome.

Dimensions

mm (inches)
Weight: 5.5 Kg  (12.1 lbs)

S mart sensor dimensions

Light sources

icon_WhiteLight

550 nm

Objective lenses

Brightfield
MAG 2.5X 5X 10X 20X 50X 100X 150X
NA 0.075 0.15 0.30 0.45 0.80 0.90 0.90
WD (mm) 6.5 23.5 17.5 4.5 1.0 1.0 0.2
FOV1 (µm) 6800 x 5675 3400 x 2837 1700 x 1420 850 x 710 340 x 284 170 x 142 113 x 95
Spatial sampling2 (µm) 5.52 2.76 1.38 0.69 0.28 0.14 0.09
Optical resolution3 (µm) 2.23 1.11 0.55 0.37 0.21 0.18 0.17
Measurement time4 (s) >3

Confocal

System noise5 (nm) 300 75 25 8 3 2 1
Maximum slope6 (º) 3 8 14 21 42 51 71

Focus Variation

Min. measurable roughness Sa > 10 nm
Maximum slope (º) up to 86º

Other objectives available:  Water Immersion | Super Long Working Distance | Extra Long Working Distance | Collar Ring Depth Focusing Correction

1 Maximum field of view with 2/3” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED.   4 For confocal, 21 scanning planes.   5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.   6 On smooth surfaces, up to 86º on rough surfaces.

Interferometry
MAG 5X 10X 20X 50X 100X
NA 0.13 0.30 0.40 0.55 0.70
WD (mm) 9.3 7.4 4.7 3.4 2.0
FOV1 (µm) 3400 x 2837 1700 x 1420 850 x 710 340 x 284 170 x 142
Spatial sampling2 (µm) 2.76 1.38 0.69 0.28 0.14
Optical resolution3 (µm) 2.76 1.38 0.69 0.30 0.24
Measurement time4 (s) >3

CSI

System noise5 (nm) 1
Maximum slope6 (º) 3 8 14 21 42

Other objectives available: Variable reflectance | Michelson | Mirau | Linnik

1 Maximum field of view with 2/3” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution. Values for white LED.   4 10 μm scanning range.   5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.    6 On smooth surfaces, up to 86º on rough surfaces.

Z performance

Z LINEAR SCALE
Vertical range 40 mm (1.6″)
Linearity <0.5 µm/mm
Resolution 2 nm

Repeatability

Step height repeatability <3 nm
conversation-icon_medium_ih

Get answers to your questions!
Connect with an expert

Just write us an email or search for
a direct contact near you.

conversation-icon_medium_ih

Get answers to your questions!
Connect with an expert

Just write us an email or search for
a direct contact near you.