Start typing and press Enter to search

This website does not support Internet Explorer. For a correct visualization we recommend to use Microsoft Edge or Google Chrome.

Dimensions

mm (inches)
Weight: 5.3 Kg  (11.7 lbs)

S mart sensor dimensions

Light sources

icon_WhiteLight

550 nm

Objective lenses

Brightfield
MAG 5X 10X 20X 50X
NA 0.15 0.30 0.45 0.80
WD (mm) 23.5 17.5 4.5 1.0
FOV1 (µm) 2820 x 2820 1410 x 1410 700 x 700 280 x 280
Spatial sampling2 (µm) 2.76 1.38 0.69 0.27
Optical resolution3 (µm) 1.11 0.55 0.37 0.21
Measurement noise4 (nm) 90 35 10 4
Maximum slope5 (º) 9 17 27 53

1 Maximum field of view with 2/3” camera and 0.25X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED in brightfield objectives. 4 Measurement noise is measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment. 5 On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available.

Interferometry
MAG 10X 20X 50X
NA 0.30 0.40 0.55
WD (mm) 7.4 4.7 3.4
FOV1 (µm) 1410 x 1410 700 x 700 280 x 280
Spatial sampling2 (µm) 1.38 0.69 0.27
Optical resolution3 (µm) 1.38 0.69 0.30
System noise4 (nm) < 5
Maximum slope5 (º) 17 24 33

1 Maximum field of view with 2/3” camera and 0.25X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for white LED in interferometric objectives. 4 Measurement noise is measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment. 5 On smooth surfaces.

Z performance

Z LINEAR STAGE
Vertical range 20 mm (0.79″)
Resolution 5 nm
conversation-icon_medium_ih

Get answers to your questions!
Connect with an expert

Just write us an email or search for
a direct contact near you.

conversation-icon_medium_ih

Get answers to your questions!
Connect with an expert

Just write us an email or search for
a direct contact near you.