PLu apex 3D Optical Tracking Profiler

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High-end stages
for a high-end system

Crossed roller bearings for the XY translation stages and an integrated design contribute to the accuracy of the positioning/tracking system. Over the full travel range of 100 mm x 100 mm x 50 mm (XYZ), straightness and flatness are < 0.1 µm (calibrated), and accuracy is maintained at < 0.1 µm. The design and the 3D positioning model help minimize Abbe errors.

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Two key tools to
align your sample

Sample preparation time is reduced to a minimum thanks to the alignment tools integrated into the software and an easy intuitive user interface. Proper sample alignment is the key to accurate results.

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Automatic lens centering tool

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Computer assisted tip-tilt alignment (manual or motorized)

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Sub-micron lateral resolution

One of the main advantages of optical imaging systems is that these are able to obtain the best lateral resolution (0.3 µm).

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0, 3
μm
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2
μm

Non-contact profiler

Contact profiler

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