Technologies

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Confocal

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Interferometry

PSI | ePSI | CSI

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Ai Focus Variation

Light sources

icon_RedLight

630nm

icon_GreenLight

530nm

icon_BlueLight

460nm

icon_WhiteLight

575nm

Dimensions

Base & Column

Controller

Objective lenses performance

Brightfield
MAG 5X 10X 20X 50X 100X 150X
NA 0.15 0.30 0.45 0.80 0.90 0.90
WD (mm) 23.5 17.5 4.5 1.0 1.0 1.5
FOV1 (µm) 3378 x 2826 1689 x 1413 845 x 707 338 x 283 169 x 141 113 x 94
Spatial sampling2 (µm) 1.38 0.69 0.34 0.13 0.07 0.05
Optical resolution3 (µm) 0.94 0.47 0.31 0.18 0.16 0.16

Confocal / Ai Focus Variation

MAG 5X 10X 20X 50X 100X 150X
System noise4 (nm) 100 30 8 4 3 2
Maximum slope5 (º) 9 17 27 53 64 64

1 Maximum field of view with 3/2” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space. Values for blue LED.   4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.   5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.

Interferometry
MAG 2.5X 5X 10X 20X 50X 100X
NA 0.075 0.13 0.30 0.40 0.55 0.70
WD (mm) 10.3 9.3 7.4 4.7 3.4 2.0
FOV1 (µm) 6756 x 5652 3378 x 2826 1689 x 1413 845 x 707 338 x 283 169 x 141
Spatial sampling2 (µm) 2.76 1.38 0.69 0.34 0.13 0.07
Optical resolution3 (µm) 1.87 1.08 0.47 0.35 0.26 0.20

PSI / ePSI / CSI

MAG 2.5X 5X 10X 20X 50X 100X
System noise4 (nm) PSI / ePSI   0.1 nm  (0.01 nm with PZT)        CSI 1 nm
Maximum slope5 (º) 4 7 17 24 33 44

Other objectives available: Variable reflectance | Michelson | Mirau | Linnik

1 Maximum field of view with 3/2” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space. Values for blue LED.   4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For PSI, 10 phase averages with vibration isolation activated. The 0.01 nm are achieved with Piezo stage scanner and temperature controlled room. Values for green LED (white LED for CSI). Resolution HD.
5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.

Accuracy and repeatability

Standard Value U, σ Technique
Step height 48600 nm U=300 nm, σ= 10 nm Confocal & CSI
7616 nm U=79 nm, σ= 5 nm Confocal & CSI
941.6 nm
U=7 nm, σ= 1 nm Confocal & CSI
186 nm U=4 nm, σ= 0.4 nm Confocal & CSI
44.3 nm U=0.5 nm, σ= 0.1 nm PSI
10.8 nm U=0.5 nm, σ= 0.05 nm PSI
Areal roughness (Sa)7 0.79 µm U=0.04 µm, σ=0.0005 µm Confocal, AiFV & CSI
Profile roughness (Ra)8 2.40 µm U=0.03 µm, σ= 0.002 µm Confocal, AiFV & CSI
0.88 µm U=0.015 µm, σ= 0.0005 µm Confocal, AiFV & CSI
0.23 µm U=0.005 µm, σ= 0.0002 µm Confocal, AiFV & CSI

Objective lense used for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI and PSI 50X 0.55NA.
Resolution 1220×1024 pixels. All measurements are done using PZT.
Uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (level of confidence 95%).
σ according to 25 measures.
7 Area of 1x1mm.   8 Profile of 4mm length.

Rotational stage

Max. measurable diameter 200 mm
Max. clamping diameter10 20 mm
Max. workpiece weight 3 Kg
Accuracy (A) 5 Arc sec/º
Bidirectional repeatability (A) 10 Arc sec
Resolution (B) 0.5 Arc sec
Straightness error11 3.6 µm / 40 mm
Parallelism error11 53.9 µm / 40 mm
Flatness error12 20 µm

All values according to ISO1101 at 20ºC +/- 1º in an anti-vibration environment.
10 ER32 collet holder.  11 St Flatness deviation according to ISO25178-2 taken on a SiC reference flat mirror and 20X objective in Confocal acquisition mode.  12 All values are taken with a 20X objective in Confocal acquisition mode and 40 mm evaluation length.

XYZ performance

XY
XY Motorized
M
Travel range (mm) 154 x 154
Z
Z COARSE (Linear stage) FINE (Piezoelectric scanner with capacitive sensor)
Vertical range 40 mm 200 µm
Resolution 5 nm 0.5 nm

Computer & Operating system

photoProduct_Sneox090ComputerDimensions
Computer 8th generation Intel® Core™ i7 Processor
Display 3840×2160 pixels resolution (4K)(27″)
Operating System Microsoft Windows 10, 64-bits
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