Improved design

Technologies

icon_Confocal_rgb_80x80

Confocal

icon_Interferometry_rgb_80x80

Interferometry

PSI | ePSI | CSI

icon_FocusVariation_rgb_80x80

Ai Focus Variation

Light sources

icon_RedLight

630nm

icon_GreenLight

530nm

icon_BlueLight

460nm

icon_WhiteLight

575nm

Dimensions

mm (inch)

Base & Column

Controller

Objective lenses

Brightfield
MAG 5X 10X 20X 50X 100X 150X
NA 0.15 0.30 0.45 0.80 0.90 0.90
WD (mm) 23.5 17.5 4.5 1.0 1.0 1.5
FOV1 (µm) 3378 x 2826 1689 x 1413 845 x 707 338 x 283 169 x 141 113 x 94
Spatial sampling2 (µm) 1.38 0.69 0.34 0.13 0.07 0.05
Optical resolution3 (µm) 0.94 0.47 0.31 0.18 0.16 0.16

Confocal / Ai Focus Variation

System noise4 (nm) 100 30 8 4 3 2
Maximum slope5 (º) 9 17 27 53 64 64
MAG 5X 10X 20X 50X 100X 150X
System noise4 (nm) 100 30 8 4 3 2
Maximum slope5 (º) 9 17 27 53 64 64

1 Maximum field of view with 3/2” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space. Values for blue LED.   4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.   5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.

Interferometry
MAG 2.5X 5X 10X 20X 50X 100X
NA 0.075 0.13 0.30 0.40 0.55 0.70
WD (mm) 10.3 9.3 7.4 4.7 3.4 2.0
FOV1 (µm) 6756 x 5652 3378 x 2826 1689 x 1413 845 x 707 338 x 283 169 x 141
Spatial sampling2 (µm) 2.76 1.38 0.69 0.34 0.13 0.07
Optical resolution3 (µm) 1.87 1.08 0.47 0.35 0.26 0.20

PSI / ePSI / CSI

System noise4 (nm) PSI / ePSI   0.1 nm  (0.01 nm with PZT)        CSI 1 nm
Maximum slope5 (º) 4 7 17 24 33 44
MAG 2.5X 5X 10X 20X 50X 100X
System noise4 (nm) PSI / ePSI   0.1 nm  (0.01 nm with PZT)        CSI 1 nm
Maximum slope5 (º) 4 7 17 24 33 44

1 Maximum field of view with 3/2” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space. Values for blue LED.   4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For PSI, 10 phase averages with vibration isolation activated. The 0.01 nm are achieved with Piezo stage scanner and temperature controlled room. Values for green LED (white LED for CSI). Resolution HD.   5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.

XYZ performance

XY
XY Motorized
Manual S M L XL
Travel range (mm) 40 x 40 114 x 75 154 x 154 255 x 245 302 x 302
Z
Z COARSE (Linear stage) FINE (Piezoelectric scanner with capacitive sensor)
Vertical range 40 mm 200 µm
Resolution 5 nm 0.5 nm

Accuracy and repeatability

Standard Value U, σ Technique
Step height 48600 nm U=300 nm, σ= 10 nm Confocal & CSI
7616 nm U=79 nm, σ= 5 nm Confocal & CSI
941.6 nm
U=7 nm, σ= 1 nm Confocal & CSI
186 nm U=4 nm, σ= 0.4 nm Confocal & CSI
44.3 nm U=0.5 nm, σ= 0.1 nm PSI
10.8 nm U=0.5 nm, σ= 0.05 nm PSI
Areal roughness (Sa)7 0.79 µm U=0.04 µm, σ=0.0005 µm Confocal, AiFV & CSI
Profile roughness (Ra)8 2.40 µm U=0.03 µm, σ= 0.002 µm Confocal, AiFV & CSI
0.88 µm U=0.015 µm, σ= 0.0005 µm Confocal, AiFV & CSI
0.23 µm U=0.005 µm, σ= 0.0002 µm Confocal, AiFV & CSI

Objective lense used for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI and PSI 50X 0.55NA.
Resolution 1220×1024 pixels. All measurements are done using PZT.
Uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (level of confidence 95%).
σ according to 25 measures.
7 Area of 1x1mm.   8 Profile of 4mm length.

System configuration

Specs_Sneox090_SystemConfiguration_V3

Computer & Operating system

photoProduct_Sneox090ComputerDimensions
Computer 8th generation Intel® Core™ i7 Processor
Display 3840×2160 pixels resolution (4K)(27″)
Operating System Microsoft Windows 10, 64-bits
Contact Us

How can we help?