Dimensions
mm (inches)
Weight: 8 Kg (18 lbs)
Technology
Light sources
530 nm
460 nm
Objective lenses
| MAG | 0.243X |
| NA | 0.015 |
| WD (mm) | 80 |
| FOV1 (mm) | 34.7 x 29.1 |
| Optical resolution2 (µm) | 9.35 |
1 Maximum field of view with 3/2” camera. 2 L&S: Line and Space. Values for blue LED.
Accuracy and repeatability
| U, σ | |
| Step height | U=2.5 µm, σ= 0.05 µm |
| Area roughness (Sa) | U=1 µm, σ=0.01 µm |
| Profile roughness (Ra) | U=1 µm, σ= 0.05 µm |
| Width measurement1 | U=5 µm, σ= 1 µm |
1 Values are assessed through repeated measurements on a reference standard performed under environmentally controlled conditions in accordance with Sensofar’s metrology protocols.
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