规格 - Sensofar

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尺寸

mm (英寸)
重量 3.6 kg (7.9 lbs)

技术

icon_Interferometry_rgb_80x80

光源

550 nm

物镜性能

干涉

放大倍数	2.5X	5X	10X	20X	50X	100X
数值孔径	0.075	0.13	0.30	0.40	0.55	0.70
工作距离 (mm)	10.3	9.3	7.4	4.7	3.4	2.0
视场范围¹ (µm)	4710.40 x 3532.80	2355.20 x 1766.40	1177.60 x 883.20	630 x 472	252 x 189	126 x 94
像素分辨率² (µm)	7.36	3.68	1.8	0.98	0.39	0.19
光学分辨率³ (µm)	7.88	3.94	1.97	0.98	0.39	0.24

CSI

系统噪声⁴ (nm)	1
最大斜率⁵ (º)	3	8	14	21	25	42

其他可兼容镜头: Variable reflectance | Michelson | Mirau | Linnik

1 采用1/3” 相机及 0.375X 场镜的最大视野。 2 表面的单个像素点大小。 3 线条和空间值，采用绿光LED 根据瑞利准则计算半衍射极限。 4根据比较连续两次在垂直于光轴的校准镜片得到的差异计算系统噪音值。在 VC-E 振动环境下获得的数值。 5 在平滑表面的最大可测角度。

Z轴性能

Z	线性导轨
行程	40 mm (1.6″)
线性度	<0.5 µm/mm
精度	2 nm

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