3D shape and texture measurements on the micro and nano-scales using a new dual-technology optical sensor head
3D shape and texture measurements on the micro and nano-scales using a new dual-technology optical sensor head full article
Roger Artigas1, F. Laguarta1, C. Cadevall1, M. Novella1, F. Rominski1, A. Wójt1
1Universitat Politècnica de Catalunya (UPC) Rambla Sant Nebridi, 10, E-08222 Terrassa, Spain.
January 2004, VDI-Berichte
New material applications and novel manufacturing processes are driving a systematic rise in market demands concerning surface inspection methods and the performance of non-contact profilers. However, analysis of the specifications and application notes of commercial optical profilers shows that no single system is able to offer all the features a general purpose user would like simultaneously. In this paper we introduce a new dual-technology (confocal & interferometer) illumination hardware setup. With this new sensor head it is possible to choose between standard microscope imaging, confocal imaging, confocal profiling, Phase Shift interferometers and white light interferometry, by simply placing the right objective on the revolving nosepiece.