Start typing and press Enter to search

This website does not support Internet Explorer. For a correct visualization we recommend to use Microsoft Edge or Google Chrome.

新闻

3D shape and texture measurements on the micro and nano-scales using a new dual-technology optical sensor head

Optical metrology
总裁兼首席技术官,物理学博士(光学工程) at Sensofar Metrology | Other articles

Roger 拥有光学表面形貌测量领域的多项专利。\n他还是 ISO 25178 技术委员会成员。\n2001 年成为 Sensofar 的联合创始人。\n自 1997 年至今,Roger 一直在传感器、仪器和系统开发中心 (CD6) 工作,担任光学工程师研究员。Roger 从 2005 年至今一直是 ISO25178 标准 TG WG16 委员会成员,该标准被广泛用于 Sensofar 开发设备的相关领域。他目前任 Sensofar Tech SL 的总裁兼首席技术官。\n

3D shape and texture measurements on the micro and nano-scales using a new dual-technology optical sensor head full article
Roger Artigas1, F. Laguarta1, C. Cadevall1, M. Novella1, F. Rominski1, A. Wójt1
1Universitat Politècnica de Catalunya (UPC) Rambla Sant Nebridi, 10, E-08222 Terrassa, Spain.
January 2004, VDI-Berichte

Abstract

New material applications and novel manufacturing processes are driving a systematic rise in market demands concerning surface inspection methods and the performance of non-contact profilers. However, analysis of the specifications and application notes of commercial optical profilers shows that no single system is able to offer all the features a general purpose user would like simultaneously. In this paper we introduce a new dual-technology (confocal & interferometer) illumination hardware setup. With this new sensor head it is possible to choose between standard microscope imaging, confocal imaging, confocal profiling, Phase Shift interferometers and white light interferometry, by simply placing the right objective on the revolving nosepiece.

Shape measurements on structured surfacesMeasurement of thick and thin films