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3D shape and texture measurements on the micro and nano-scales using a new dual-technology optical sensor head

Optical metrology
President & CTO, Ph.D. in Physics (Optical Engineering) at Sensofar Metrology | Other articles

Holder of several patents in the field of Optical Surface Metrology.
Technical committee member of the ISO 25178.
Co-founder of Sensofar in 2001.
Roger has been working since 1997 to the present at the Centre for Sensors, Instruments and Systems Development (CD6) as optical engineer researcher. From 2005 to the present is part of the TG WG16 committee of the ISO25178 standard which is applied in the field of equipment developed in Sensofar. Currently he holds the position of President and CTO at Sensofar Tech SL.

3D shape and texture measurements on the micro and nano-scales using a new dual-technology optical sensor head full article
Roger Artigas1, F. Laguarta1, C. Cadevall1, M. Novella1, F. Rominski1, A. Wójt1
1Universitat Politècnica de Catalunya (UPC) Rambla Sant Nebridi, 10, E-08222 Terrassa, Spain.
January 2004, VDI-Berichte

Abstract

New material applications and novel manufacturing processes are driving a systematic rise in market demands concerning surface inspection methods and the performance of non-contact profilers. However, analysis of the specifications and application notes of commercial optical profilers shows that no single system is able to offer all the features a general purpose user would like simultaneously. In this paper we introduce a new dual-technology (confocal & interferometer) illumination hardware setup. With this new sensor head it is possible to choose between standard microscope imaging, confocal imaging, confocal profiling, Phase Shift interferometers and white light interferometry, by simply placing the right objective on the revolving nosepiece.

Shape measurements on structured surfacesMeasurement of thick and thin films