Improving the measurement of thick and thin films with optical profiling techniques
In this paper, we introduce new methods based on confocal techniques, which make it possible to measure sub-micrometric layers on structured samples.
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In this paper, we introduce new methods based on confocal techniques, which make it possible to measure sub-micrometric layers on structured samples.
We introduce a new system based on a line-scan CCD to track interference fringes.
We present the most representative results obtained during the testing stage of an instrument called UPC-ZEBRA that uses a novel interferometric technique to measure piston error during the daytime.
In this paper, we introduce a new method based on a proprietary unfolded confocal arrangement, which uses the light that is reflected onto the inner surfaces and that passes through the nozzle [...]
The advantages of confocal technology in combination with interference techniques provide a unique wide spectrum of applications, a real breakthrough in non-contact optical profiling on the micro [...]
We introduce a new dual-technology (confocal & interferometer) illumination hardware setup, in this paper.
In this paper we introduce a new method based on non-contact confocal techniques to measure the shape of structured samples.
A new interferometric technique applied to the measurement of segment vertical misalignment (piston error) in segmented mirrors, is presented in this paper.
A detailed study of the wavefront errors embedded in the wavefront at different stages of the interferometer is performed to demonstrate the ability of the instrument to perform nanometric piston [...]
We present the results obtained in micro- or nanomeasurements of high precision optical surfaces, texture assessment of non-homogeneous liquid depositions and metrology of microstructures such as [...]
We present a new optical instrument based on the concept of confocal microscopy.
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