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Development of a line-scan CCD-based fringe tracker for optical interferometry

Optical metrology
研发工程经理,物理学博士 at Sensofar Medical | Other articles

2003 年,Agustí 获得富布赖特奖学金,在加州大学欧文分校从事大型拼合式望远镜的定相研究。
他的研究领域包括光学测量和大型拼合式望远镜的定相。他的研究工作帮助 Sensofar 在创新和最高技术水平方面始终保持领先地位。

Development of a line-scan CCD-based fringe tracker for optical interferometry full article
Agustí Pintó1, Ferran Laguarta1
1Center for Sensors, Instruments and Systems Development (CD6), Universitat Politècnica de Catalunya (UPC) Rambla Sant Nebridi, 10, E-08222 Terrassa, Spain.
Applied Optics, Vol. 45, Issue 26, pp. 6694-6701 (2006)


Traditional high-precision optical techniques, such as interferometry, are in ever-greater demand for noncontrolled environments. This is the case for the UPC-ZEBRA, a large-aperture interferometer that was built to measure vertical discontinuities (i.e., piston errors) in segmented mirrors. The large mechanical systems used to drive the interferometer to the different measurement positions generate perturbations that are highly incompatible with the expected piston measurements on the nanometer scale. We introduce a new system based on a line-scan CCD to track interference fringes. The error signal obtained from this fringe tracker has been used in a closed-loop control system to actively stabilize the interferometer. The perturbation has been attenuated by a factor of 1/200.

3D shape and texture measurementsMeasurement of thick and thin films