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Optical metrology

3D-shape measurement of nozzles on the micrometric scale

Optical metrology
Sensofar Metrology 名誉主席,Sensofar Medical 总裁兼首席执行官,物理学博士 | Other articles

2001 年的 Sensofar 创始成员,2012 年的 Sensofar Medical 创始成员。
他在巴塞罗那理工学院 (UPC) 开启了学术生涯,BCN 光学工程教授,光子学硕士,CD6 的创始成员和前任主任(CD6 是隶属于 UPC 的技术创新中心,并被加泰罗尼亚政府认可为 TECNIO 网络成员)。
他是 150 多篇科学文献的作者,10 篇硕士和博士论文的导师,3 项国际家族专利的发明者,负责由国家和欧洲公共机构以及私营公司资助的 50 多个研究项目。
他还领导了“南欧光子学和光学集群”(SECPhO) 的创建,管理过一家专注于高科技投资的风险投资公司长达 14 年之久。

3D-shape measurement of nozzles on the micrometric scale full article
Ferran Laguarta1, Roger Artigas1, Cristina Cadevall1
1Universitat Politècnica de Catalunya (UPC) Rambla Sant Nebridi, 10, E-08222 Terrassa, Spain.
Proceedings Volume 5457, Optical Metrology in Production Engineering; (2004)
Event: Photonics Europe, 2004, Strasbourg, France


One of the most challenging applications of optical metrology is measuring the shape of the inner surfaces of nozzles such as those of fuel injectors, wiring dies and printheads. A current non-contact solution is confocal laser scanning microscopy (CLSM). However, the inner surfaces of the nozzles behave as though they were optically polished, which gives rise to very weak, backscattered light signals. Therefore, measuring with CLSM is a very slow process and the uncertainty of the results is very high. Moreover, new nozzle designs are moving towards even steeper walls, which means that CLSM may well become useless in the near future. In this paper, we introduce a new method based on a proprietary unfolded confocal arrangement, which uses the light that is reflected onto the inner surfaces and that passes through the nozzle instead of the backscattering signal. The setup and implementation of this new method and the attendant profiling algorithms are explained. With regard to real applications, we focus on measuring the 3D topography of conical nozzles drilled into organic polymer films with excimer lasers. These films are used in the manufacture of the orifice plates, which are attached to the printheads of thermal inkjet cartridges. Fast measurements and accurate results obtained for nozzles of 25 micrometers in diameter and wall angles close to 17º are demonstrated.

Dual-technology optical sensor head