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鉴于CMP过程中表面之间的机械相互作用是该过程所有阶段的关键变量,因此对于CMP过程的表面测量的需求是显而易见的。在整个过程中需要定期进行表征的表面包括调节盘表面、晶圆表面和垫片表面。
引力波是时空结构中的波动。当如超新星爆炸或黑洞之间的相互作用等重大宇宙事件发生时,产生的引力波在地球上是可检测的。经过50年的科学研究和技术发展,现在已经可以感知到引力波。
在这项研究中,我们展示了非侵入性的形态表面分析技术,与经过良好评估的生化方法相匹配,清晰区分生理和病理细胞。
研究重点是改善类金刚石(DLC)涂层的摩擦力学性能。这类涂层采用新型PVD技术高功率脉冲磁控溅射(HiPIMS),通过正脉冲沉积在工具钢上。
在这个案例研究中,Linkam和Sensofar Metrology 展示了他们在制作一个温度控制的光学轮廓仪实验设备方面的合作。
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