就地计量学用于CMP中的垫面监测
鉴于CMP过程中表面之间的机械相互作用是该过程所有阶段的关键变量,因此对于CMP过程的表面测量的需求是显而易见的。在整个过程中需要定期进行表征的表面包括调节盘表面、晶圆表面和垫片表面。
This website does not support Internet Explorer. For a correct visualization we recommend to use Microsoft Edge or Google Chrome.
鉴于CMP过程中表面之间的机械相互作用是该过程所有阶段的关键变量,因此对于CMP过程的表面测量的需求是显而易见的。在整个过程中需要定期进行表征的表面包括调节盘表面、晶圆表面和垫片表面。
在这个案例研究中,Linkam和Sensofar Metrology 展示了他们在制作一个温度控制的光学轮廓仪实验设备方面的合作。
我们研究嵌入在光子晶体光腔中、导致发射增强(赛尔效应)的量子点的光学性质,或者基于嵌入在波导中、用于生产光子多路复用器件的量子点的光学性质。
该研究是基于嵌入在光子晶体光腔中、导致发射增强(赛尔效应)的量子点的光学性质,或者基于嵌入在波导中、用于生产光子多路复用器件的量子点的光学性质。
在用于生物应用的纳米压力传感器的制造中,牺牲层蚀刻和由真空间隙分隔开的两个膜的密封,以形成 Fabry-Pérot 谐振器,这些都是至关重要的因素。
使用 Sensofar 3D 光学轮廓仪,我们可以检查模具的高度,并计算是否有足够的银层来达到所需的导电性,从而获得良好的性能。
Cookie | Type | Duration | Description |
---|---|---|---|
_icl_visitor_lang_js | persistent | 24 hours | Allows the website to recognise the user’s language and display content accordingly. |
cli_user_preference | persistent | Session | This cookie is saved by the GDPR Cookie CThis cookie is saved by the GDPR Cookie Consent plugin and is used to record whether or not the user has consented to the use of cookies. It does not store any personal data.onsent plugin and is used to record whether or not the user has consented to the use of cookies. It does not store any personal data. |
cookielawinfo-checkbox-analytics | persistent | 1 year | This cookie is set by GDPR Cookie Consent plugin. The cookies is used to store the user consent for the cookies in the category "Analytics". |
cookielawinfo-checkbox-necessary | persistent | 1 year | This cookie is set by GDPR Cookie Consent plugin. The cookies is used to store the user consent for the cookies in the category "Necessary". |
cookielawinfo-checkbox-non-necessary | persistent | 1 year | This cookie is set by GDPR Cookie Consent plugin. The cookies is used to store the user consent for the cookies in the category "Non Necessary". |
PHPSESID | persistent | Session | Cookie used by the PHP scripting language to allow session variables to be saved. |
viewed_cookie_policy | persistent | 1 year | The cookie is set by the GDPR Cookie Consent plugin and is used to store whether or not user has consented to the use of cookies. It does not store any personal data. |
wpml_browser_redirect_test | persistent | 24 hours | Allows the website to recognise the user’s language and display content accordingly. |
Cookie | Type | Duration | Description |
---|---|---|---|
_ga | persistent | 2 years | It is used to distinguish users. |
_gat | persistent | Expires when you close the session. | It is used to limit the percentage of requests. |
_gid | persistent | 24 hours | It is used to distinguish users. |