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Optical metrology

3D label free bio-transfer standards

Optical metrology
研发工程经理,光学工程博士,光子学硕士 at Sensofar Metrology | Other articles

Carlos 自 2010 年起开始在 Sensofar 参与开发共聚焦、干涉测量和多焦面叠加技术,自 2018 年起担任研发工程经理一职。他的研究领域是光机系统设计和图像处理。
他在光学工程方面的综合研究工作帮助 Sensofar 研发团队在创新和最高技术水平方面始终保持领先地位。

3D label free bio-transfer standards, full article
Miikka Järvinen,1 Tuomas Vainikka,1 Tapani Viitala,1 Carlos Bermudez,2 Roger Artigas,2 Anton Nolvi,1 Pol Martinez,2 Niklas Sandler,3 Edward Hæggström,1 Ivan Kassamakov1,4
1 Univ. of Helsinki (Finland)
2 Sensofar-Tech, S.L. (Spain)
3 Åbo Akademi Univ. (Finland)
4 Helsinki Institute of Physics (Finland)
Proceedings Volume 10819, Optical Metrology and Inspection for Industrial Applications V; 108190D (2018) 
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

Two kinds of 3D label free Bio-Transfer-Standards (BTS) have been further developed at the University of Helsinki (UH). The first one, NanoRuler, is a staircase BTS featuring eight fatty acid bilayers which allows vertical calibration in the range of 5 to 40 nm. The second one, NanoStar, is a V-shaped BTS featuring two 5 nm tall bilayers that overlap at 10° angle. This standard enables the determination of the Instrument Transfer Function (ITF). A stability test was conducted on the BTSs, during which the standards were stored in laboratory conditions, and were profiled each week. Profiling was done using a custom-built Scanning White Light Interferometer (SWLI). The stability of NanoStar was ± 0.3 nm, and of NanoRuler ± 0.5 nm to ± 2.5 nm. The BTSs maintained their specified properties for at least six months and therefore allow vertical calibration and ITF determination. In addition, changes in surface morphology of one NanoRuler subjected to water immersion are presented. This paper reports intermediate findings during an ongoing stability test that will run for 24 months.

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