S neox Cleanroom integrable head Specifications - Sensofar

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尺寸

mm (英寸)
重量: 8.3 Kg (18.4 lbs)

技术

icon_Confocal_rgb_80x80

icon_Interferometry_rgb_80x80

干涉
PSI | ePSI | CSI

icon_FocusVariation_rgb_80x80

Ai 多焦面叠加

光源

630 nm

530 nm

460 nm

575 nm

物镜性能

明场
干涉

明场

放大倍率	5X	10X	20X	50X	100X	150X
数值孔径	0.15	0.30	0.45	0.80	0.90	0.90
工作距离 (mm)	23.5	17.5	4.5	1.0	1.0	1.5
视场范围¹ (µm)	3378 x 2826	1689 x 1413	845 x 707	338 x 283	169 x 141	113 x 94
像素分辨率² (µm)	1.38	0.69	0.34	0.13	0.07	0.05
光学分辨率³ (µm)	0.94	0.47	0.31	0.18	0.16	0.16
系统噪声⁴ (nm)	100	30	8	4	3	2
最大斜率⁵ (º)	9	17	27	53	64	64

1 采用2/3”相机及 0.5X 场镜的最大视野。 2表面的单个像素点大小。 3 线条和空间值, 采用蓝光LED根据瑞利准则计算半衍射极限。 4 根据比较连续两次在垂直于光轴的校准镜片得到的差异计算系统噪音值。 5在光滑表面的最大可测角度。在粗糙表面可达86º。

干涉

放大倍率	2.5X	5X	10X	20X	50X	100X
数值孔径	0.075	0.13	0.30	0.40	0.55	0.70
工作距离 (mm)	10.3	9.3	7.4	4.7	3.4	2.0
视场范围¹ (µm)	6756 x 5652	3378 x 2826	1689 x 1413	845 x 707	338 x 283	169 x 141
像素分辨率² (µm)	2.76	1.38	0.69	0.34	0.13	0.07
光学分辨率³ (µm)	1.87	1.08	0.47	0.35	0.26	0.20
系统噪声⁴ (nm)	PSI / ePSI 0.1 nm (0.01 nm with PZT) CSI 1 nm
最大斜率⁵ (º)	4	7	17	24	33	44

1 采用2/3”相机及 0.5X 场镜的最大视野。 2表面的单个像素点大小。 3 线条和空间值, 采用蓝光LED根据瑞利准则计算半衍射极限。 4 根据比较连续两次在垂直于光轴的校准镜片得到的差异计算系统噪音值。 5在光滑表面的最大可测角度。在粗糙表面可达86º。

Z轴性能

Z	普通 (线性导轨)	精细 (配电容传感器的压电陶瓷晶体z轴)
行程	40 mm	200 µm
精度	5 nm	1.25 nm

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.mk-fancy-title.pattern-style span,.full-width-56 .mk-blog-view-all{background-color:#212122 !important;}#mk-button-66{margin-bottom:1px;margin-top:0px;margin-right:15px;}#mk-button-66 .mk-button{display:inline-block;max-width:100%;}#mk-button-66 .mk-button{width:210px;}#mk-button-66 .mk-button{border-color:#d33;color:#d33 !important;}#mk-button-66 .mk-button .mk-svg-icon{fill:#d33 !important;}#mk-button-66 .mk-button:hover{background-color:#d33;color:#fff !important;}#mk-button-66 .mk-button:hover .mk-svg-icon{fill:#fff !important;}#mk-button-67{margin-bottom:1px;margin-top:0px;margin-right:15px;}#mk-button-67 .mk-button{display:inline-block;max-width:100%;}#mk-button-67 .mk-button{width:210px;}#mk-button-67 .mk-button{border-color:#d33;color:#d33 !important;}#mk-button-67 .mk-button .mk-svg-icon{fill:#d33 !important;}#mk-button-67 .mk-button:hover{background-color:#d33;color:#fff !important;}#mk-button-67 .mk-button:hover .mk-svg-icon{fill:#fff !important;}#rs-demo-id{}