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Optical Metrology

Round Robin test on bio-imaging transfer standard for 3D optical profilers

Optical Metrology
研究開発エンジニアリングマネージャー、光工学博士、フォトニクス理学修士 at Sensofar Metrology


Round Robin test on bio-imaging transfer standard for 3D optical profilers, full article
A. Nolvi,1,2 T. Viitala,1 A. García Pérez,1 N. Sandler,3 E. Hæggström,1 C. Bermudez,4 R. Artigas,4 I. Kassamakov1
1Univ. of Helsinki (Finland)
2Åbo Akademi (Finland)
3Åbo Akademi Univ. (Finland)
4Sensofar Tech SL, (Spain)

Proceedings Volume 10110, Photonic Instrumentation Engineering IV; 101100M (2017)
Event: SPIE OPTO, 2017, San Francisco, California, United States


A stair case height Bio-Transfer-Standard (BTS), developed and produced at the University of Helsinki (UH), was measured in two laboratories. The Round Robin test on bio-imaging, aims to determine whether BTS works with different optical profilers in different laboratories. First the artefact was measured at UH using a custom-built Scanning White Light Interferometer. Then BTS was measured at Sensofar-Tech, S.L. using an S neox type interferometer working either in Phase Shifting Interferometry mode or in Imaging Confocal Microscopy mode. To remove the influence of system calibration, a method featuring sample shifting and measurement subtraction was used. The BTS features eight lipid bilayer steps that each are 4.6 ± 0.1 nm tall on average.

All 30 measurements done by four different operators at the two laboratories agree to within 0.1 nm which agrees with theoretical estimates and with measurements done using a surface plasmon resonance technique. The Round Robin results show the applicability of the newly developed bio-imaging transfer standard for calibrating 3D optical profilers.

surface texture and coating thickness