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Sensofar introduces their most advanced optical 3D profiler: PLu neox

Metrology, Neuigkeiten, Produkte

The PLu neox is the most advanced optical profiler from Sensofar. Based on the successful series of PLu optical surface profilers, the PLu neox covers the broadest range of applications on 3D and thin film metrology due to the combination of confocal scanning, phase shift interferometry, vertical scanning interferometry and spectroscopic reflectometry. This powerful combination allows for fast 2D and 3D analysis of technical surfaces with less than 0.1 nm vertical resolution, the capability to measure steep slopes over 70 degrees on smooth surfaces, and thin film metrology with less than 1 nm of resolution.

Sensofar has also incorporated their patented scanning microdisplay technology, enabling fast confocal scanning for up to 12.5 confocal images per second. Improved confocal and interferometry algorithms allow vertical scanning speeds of up to 800 µm/sec, giving typical measurement times including calculations of less than 5 seconds. The Plu neox incorporates two vertical scanners: a piezo-based scanner for high-resolution 3D measurements down to 0.01 nm, and a large vertical scanner with more than 40 mm measuring range. The PLu neox comes with a fully automated xy mapping stage, handling samples up to 500 mm². And with over 50 Nikon objectives to choose from, with magnifications from 2.5x up to 200x, the range of applications are limitless.

Tool operation and recipe creation is performed using SensoSCAN software, which includes a comprehensive set of 2D &  3D data analysis and viewing tools. For advanced characterization and data reporting, SensoMAP, based on Mountains Technology from Digital surf, offers intuitive state-of-the-art analytical software, featuring different views, surface operators and international areal surface standards.

In the PLu neox, the team at Sensofar have integrated advanced optics and technologies creating a powerful 3D surface profiler and thin film analysis tool, able to cope with a diverse range of surface metrology applications.

Sensofar will be demonstrating the PLu neox at different shows during the next few months. We look forward to meeting you!