Step height standards based on for 3D metrology
We investigate whether a good enough calibration accuracy can be reached to enable a useful calibration of the CSI system.
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We investigate whether a good enough calibration accuracy can be reached to enable a useful calibration of the CSI system.
In this paper, we show the development of an Active illumination Focus Variation on an existing confocal microscope using Microdisplay Scanning technology.
We have developed a miniaturized optical sensor head that integrates Coherence Scanning Interferometry (CSI) allowing to adapt the lateral resolution to the laser texturing process. Reduced [...]
This paper reports intermediate findings during an ongoing stability test that will run for 24 months.
In this paper we show that the residual flatness error on a reference sphere measured with a 10X can make the measurement of the radius to have up to 10% error.
By the combination of a high numerical aperture (NA) optical system, a rotational stage and a line-scan camera, unrolled sections of the outer and inner surfaces of the stent are obtained and [...]
In this paper we propose the use of a rotational stage with the combination of a slit-confocal imaging system capable of acquiring unrolled confocal images with a line-scan approach while the [...]
We make a comparison between the conventional microscope image formation and a new approach. A calibration process and the investigation of the error sources that lead to inaccuracies of the [...]
In this paper, a new technique to fuse data incoming from a single confocal and focus variation scan is presented.
A theoretical model and a simulation are proposed, and a measurement with white light interferometry is shown in this publication.
The Round Robin results show the applicability of the newly developed bio-imaging transfer standard for calibrating 3D optical profilers.
A theoretical model and a simulation are proposed, and a measurement with white light interferometry is shown in this publication.
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