薄膜フォトニック結晶デバイスの非破壊的な特性評価
本研究は増強放出(パーセル効果)をもたらすフォトニック(PhC)結晶のキャビティまたは光子多重化デバイスを形成する導波路(WG)に埋め込まれた量子ドット(QD)の光学特性に基づいています。
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本研究は増強放出(パーセル効果)をもたらすフォトニック(PhC)結晶のキャビティまたは光子多重化デバイスを形成する導波路(WG)に埋め込まれた量子ドット(QD)の光学特性に基づいています。
本研究では、照明器具向けの大型有機光ダイオード(OLED)の製作が課題でした。これには、デバイスの電流を抑えて抵抗損失を防ぐために、見えない状態でOLEDを直列接続することが求められました。選択的に層を構造化するために、フェムト秒レーザーを使用しました。
生物学応用向けナノプレッシャーセンサーの製造では、犠牲層エッチングと、ファブリ・ペロ共振器を形成するために真空で分離された2枚の薄膜のシーリングが極めて重要です。
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