Marta Duch

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生物学的応用向けナノプレッシャーセンサーの初期たわみ測定

Case study, SMT, 消費者エレクトロニクス

5 11月, 2019

生物学応用向けナノプレッシャーセンサーの製造では、犠牲層エッチングと、ファブリ・ペロ共振器を形成するために真空で分離された2枚の薄膜のシーリングが極めて重要です。

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