Sensofar debuts new research at World of Photonics 2025: Tackling flatness errors in optical metrology
We are proud to highlight the debut one research paper by our colleague, Lena Zhukova, at the World of Photonics Congress held in Munich. This paper, “Mapping and correcting residual flatness errors in optical metrology for high precision surface measurements” by Lena Zhukova, is set to make significant contributions to the field of optical metrology.
Author(s): Lena Zhukova, Roger Artigas, Sensofar-Tech, S.L. (Spain); Guillem Carles Santacana, Sensofar-Tech, S.L. (Spain)
24 June 2025 • 16:40 – 17:00 CEST | ICM, Saal 14c
Residual flatness errors in optical metrology arise from the dependence of optical aberrations on a sample’s local slope and field position, presenting challenges for accurate surface characterization of tilted samples. This study maps these errors using measurements of a flat mirror at various tilt angles, correlating residual flatness error with local slope and position. A model was developed to estimate and correct these errors for arbitrary sample geometries. Validated through experiments, the method improves measurement accuracy and reliability, resulting in a reduction of the RMS. The approach improves surface characterization for non-flat samples, advancing precision in optical metrology.
