Improved design

Technologies

icon_Confocal_rgb_80x80

Confocal

icon_Interferometry_rgb_80x80

Interferometry

PSI | ePSI | CSI

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Ai Focus Variation

Light sources

icon_RedLight

630nm

icon_GreenLight

530nm

icon_BlueLight

460nm

icon_WhiteLight

575nm

Dimensions

mm (inch)

Base & Column

Controller

Objective lenses

Brightfield
tableObj_BF_Sneox090

Confocal / Ai Focus Variation

tableObj_Conf.AiFV

1 Maximum field of view with 3/2” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space. Values for blue LED.   4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.   5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.

Interferometry
tableObj_Interf_Sneox090

PSI / ePSI / CSI

tableObj_PSI-CSI_Sneox090

1 Maximum field of view with 3/2” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space. Values for blue LED.   4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For PSI, 10 phase averages with vibration isolation activated. The 0.01 nm are achieved with Piezo stage scanner and temperature controlled room. Values for green LED (white LED for CSI). Resolution HD.   5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.

XYZ performance

XY
Z

Accuracy and repeatability

tableAccuracyRepeatability

Objective lense used for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI and PSI 50X 0.55NA.
Resolution 1220×1024 pixels. All measurements are done using PZT.
Uncertainty (U) according to ISO/IEC guide 98-3:2008€ GUM:1995, K=1,96 (level of confidence 95%). σ according to 25 measures.
7 Area of 1x1mm.   8 Profile of 4mm lenght.

System configuration

specs_sneox090_systemconfiguration

Computer & Operating system

photoProduct_Sneox090ComputerDimensions
Computer Intel® Core™ Processor 8th generation i7
Screen 3840×2160 pixels resolution (4K)(27″)
Operating System Microsoft Windows 10, 64-bits
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