Technologies

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Confocal

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Interferometry

PSI | ePSI | VSI

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Focus Variation

 

Light sources

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630nm

icon_GreenLight

530nm

icon_BlueLight

460nm

icon_WhiteLight

550nm

Dimensions

Base & Column

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Controller

Objective lenses performance

Brightfield
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Confocal

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Focus Variation

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Other objectives available: Water Immersion | Super Long Working Distance | Extra Long Working Distance | Collar Ring Depth Focusing Correction

1 Maximum field of view with 2/3” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED.   4 For confocal, 21 scanning planes.   5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.   6 On smooth surfaces, up to 86º on rough surfaces.

Interferometry

PSI / ePSI / VSI

Other objectives available: Variable reflectance | Michelson | Mirau | Linnik

1 Maximum field of view with 2/3” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED.   4 10 μm scanning range.   5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For PSI, 10 phase averages with vibration isolation activated. The 0.01 nm are achieved with Piezo stage scanner and temperature controlled room.    6 On smooth surfaces, up to 86º on rough surfaces.

Rotational stage

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XYZ performance

XY
Z
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Computer & Operating system

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Computer HP Z240 SFF TOWER
Screen LG 34UM88-P 2560×1080 px
Operating System Microsoft Windows 10, 64-bits
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