Technologies

icon_Confocal_rgb_80x80

Confocal

icon_Interferometry_rgb_80x80

Interferometry

PSI | ePSI | CSI

icon_FocusVariation_rgb_80x80

Ai Focus Variation

Light sources

icon_RedLight

630nm

icon_GreenLight

530nm

icon_BlueLight

460nm

icon_WhiteLight

575nm

Dimensions

Base & Column

Controller

Objective lenses performance

Brightfield
tableobj_bf_sneox090__rev2

Confocal / Ai Focus Variation

tableobj_sneox-fiveaxis2019_conf.aifv_

1 Maximum field of view with 3/2” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space. Values for blue LED.   4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.   5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.

Interferometry
tableobj_interf_sneox090_rev2

PSI / ePSI / CSI

tableObj_PSI-CSI_Sneox090

Other objectives available: Variable reflectance | Michelson | Mirau | Linnik

1 Maximum field of view with 3/2” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space. Values for blue LED.   4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For PSI, 10 phase averages with vibration isolation activated. The 0.01 nm are achieved with Piezo stage scanner and temperature controlled room. Values for green LED (white LED for CSI). Resolution HD.
5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.

Accuracy and repeatability

tableAccuracyRepeatability

(6) Objective lense used for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI and PSI 50X 0.55NA.
Resolution 1220×1024 pixels. All measurements are done using PZT.
Uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (level of confidence 95%). σ according to 25 measures.
7 Area of 1x1mm.   8 Profile of 4mm length.

Rotational stage

tablerotationalstage_sneoxfiveaxis2019

(9) All values according to ISO1101 at 20ºC +/- 1º in an anti-vibration environment.  10 ER32 collet holder.  11 St Flatness deviation according to ISO25178-2 taken on a SiC reference flat mirror and 20X objective in Confocal acquisition mode.  12 All values are taken with a 20X objective in Confocal acquisition mode and 40 mm evaluation length.

XYZ performance

XY
Z

Computer & Operating system

photoProduct_Sneox090ComputerDimensions
Computer 8th generation Intel® Core™ i7 Processor
Display 3840×2160 pixels resolution (4K)(27″)
Operating System Microsoft Windows 10, 64-bits
Contact Us

How can we help?