Technologies

S mart
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Confocal

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Interferometry

VSI

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Focus Variation

S onix
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Interferometry

VSI

Light sources

icon_WhiteLight

550nm

Dimensions

S mart
photoProduct_SmartSensorhead
photoProduct_SmartControllerDimensions
S onix
photoProduct_SonixSensorheadDimensions
photoProduct_SonixControllerDimensions

Objectives performance

S mart

Brightfield

tableObj_BF_NotSneox

Confocal

tableObj_Confocal_Z_NotSlynx

Focus Variation

tableObj_FV

Other objectives available: Water Immersion | Super Long Working Distance | Extra Long Working Distance | Collar Ring Depth Focusing Correction

1 Maximum field of view with 2/3” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED.   4 For confocal, 21 scanning planes.   5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.   6 On smooth surfaces, up to 86º on rough surfaces.

Interferometric

tableObj_Int_NotSneoxNotSonix

VSI

tableObj_IntVSI_Z_SmartOnly

Other objectives available: Variable reflectance | Michelson | Mirau | Linnik

1 Maximum field of view with 2/3” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED.   4 10 μm scanning range.   5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.    6 On smooth surfaces, up to 86º on rough surfaces.

S onix

Interferometric

tableObj_Int_SonixOnly

VSI

tableObj_IntVSI_Z_SonixOnly

Other objectives available: Variable reflectance | Michelson | Mirau | Linnik

1 Maximum field of view with 2/3” camera and 0.375X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED.   4 Measurement speed 1X.   5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.    6 On smooth surfaces, up to 86º on rough surfaces.

Z performance

tableStage_Z_NotSneox

Software

S mart
tableSoftware_Smart
S onix
tableSoftware_Sonix

Computer & Operating system

S mart
photoProduct_SMartComputerDimensions
Computer HP Z240SSF
Screen HP27i 2560×1440 px
Operating System Microsoft Windows 10, 64-bits
S onix
photoProduct_SonixComputerDimensions
Computer HP Z240SSF
Screen HP23i 1920×1080 px
Operating System Microsoft Windows 10, 64-bits
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