Light sources
550nm
Objectives performance
Brightfield
| MAG | 2.5X | 5X | 10X | 20X | 50X | 100X | 150X |
| NA | 0.075 | 0.15 | 0.30 | 0.45 | 0.80 | 0.90 | 0.90 |
| WD (mm) | 6.5 | 23.5 | 17.5 | 4.5 | 1.0 | 1.0 | 0.2 |
| FOV1 (µm) | 7016 x 5280 | 3508 x 2640 | 1754 x 1320 | 877 x 660 | 351 x 264 | 175 x 132 | 117 x 88 |
| Spatial sampling2 (µm) | 5.52 | 2.76 | 1.38 | 0.69 | 0.28 | 0.14 | 0.09 |
| Optical resolution3 (µm) | 2.23 | 1.11 | 0.55 | 0.37 | 0.21 | 0.18 | 0.17 |
| Measurement time4 (s) | >3 | ||||||
Confocal
| Vertical resolution5 (nm) | 300 | 75 | 25 | 8 | 3 | 2 | 1 |
| Maximum slope6 (º) | 3 | 8 | 14 | 21 | 42 | 51 | 71 |
Focus Variation
| Min. measurable roughness | Sa > 10 nm |
| Maximum slope (º) | up to 86º |
Other objectives available: Water Immersion | Super Long Working Distance | Extra Long Working Distance | Collar Ring Depth Focusing Correction
1 Maximum field of view with 2/3” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED. 4 For confocal, 21 scanning planes. 5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. 6 On smooth surfaces, up to 86º on rough surfaces.
Interferometric
| MAG | 5X | 10X | 20X | 50X | 100X | ||
| NA | 0.13 | 0.30 | 0.40 | 0.55 | 0.70 | ||
| WD (mm) | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 | ||
| FOV1 (µm) | 3508 x 2640 | 1754 x 1320 | 877 x 660 | 351 x 264 | 175 x 132 | ||
| Spatial sampling2 (µm) | 2.76 | 1.38 | 0.69 | 0.28 | 0.14 | ||
| Optical resolution3 (µm) | 2.76 | 1.38 | 0.69 | 0.30 | 0.24 | ||
| Measurement time4 (s) | >3 | ||||||
VSI
| Vertical resolution5 (nm) | 1 | ||||
| Maximum slope6 (º) | 3 | 8 | 14 | 21 | 42 |
Other objectives available: Variable reflectance | Michelson | Mirau | Linnik
1 Maximum field of view with 2/3” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED. 4 10 μm scanning range. 5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. 6 On smooth surfaces, up to 86º on rough surfaces.
Interferometric
| MAG | 2.5X | 5X | 10X | 20X | 50X | 100X |
| NA | 0.075 | 0.13 | 0.30 | 0.40 | 0.55 | 0.70 |
| WD (mm) | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 |
| FOV1 (µm) | 5040 x 3780 | 2520 x 1890 | 1260 x 945 | 630 x 472 | 252 x 189 | 126 x 94 |
| Spatial sampling2 (µm) | 7.88 | 3.94 | 1.97 | 0.98 | 0.39 | 0.19 |
| Optical resolution3 (µm) | 7.88 | 3.94 | 1.97 | 0.98 | 0.39 | 0.24 |
| Measurement time4 (µm/s) | 25 | |||||
VSI
| Vertical resolution5 (nm) | 1 | |||||
| Maximum slope6 (º) | 3 | 8 | 14 | 21 | 25 | 42 |
Other objectives available: Variable reflectance | Michelson | Mirau | Linnik
1 Maximum field of view with 2/3” camera and 0.375X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED. 4 Measurement speed 1X. 5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. 6 On smooth surfaces, up to 86º on rough surfaces.
Sensors’ Z performance
| Z | LINEAR SCALE |
| Vertical range | 40 mm (1.6″) |
| Linearity | <0.5 µm/mm |
| Resolution | 2 nm |
Software
| User management rights | Administrator, advanced operator, operator |
| Acquisition technologies | Confocal, VSI and Focus Variation |
| Measurement types | Image, 3D, 3D thickness, profile and coordinates |
| Advanced software analysis | SensoMAP and SensoPRO |
| Remote control | Software Development Kit (SDK) (optional) |
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