Technologies

S mart
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Confocal

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Interferometry

VSI

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Focus Variation

S onix
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Interferometry

VSI

Light sources

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550nm

Dimensions

S mart
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S onix
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Objectives performance

S mart

Brightfield

MAG 2.5X 5X 10X 20X 50X 100X 150X
NA 0.075 0.15 0.30 0.45 0.80 0.90 0.90
WD (mm) 6.5 23.5 17.5 4.5 1.0 1.0 0.2
FOV1 (µm) 7016 x 5280 3508 x 2640 1754 x 1320 877 x 660 351 x 264 175 x 132 117 x 88
Spatial sampling2 (µm) 5.52 2.76 1.38 0.69 0.28 0.14 0.09
Optical resolution3 (µm) 2.23 1.11 0.55 0.37 0.21 0.18 0.17
Measurement time4 (s) >3

Confocal

Vertical resolution5 (nm) 300 75 25 8 3 2 1
Maximum slope6 (º) 3 8 14 21 42 51 71

Focus Variation

Min. measurable roughness Sa > 10 nm
Maximum slope (º) up to 86º

Other objectives available: Water Immersion | Super Long Working Distance | Extra Long Working Distance | Collar Ring Depth Focusing Correction

1 Maximum field of view with 2/3” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED.   4 For confocal, 21 scanning planes.   5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.   6 On smooth surfaces, up to 86º on rough surfaces.

Interferometric

MAG 5X 10X 20X 50X 100X
NA 0.13 0.30 0.40 0.55 0.70
WD (mm) 9.3 7.4 4.7 3.4 2.0
FOV1 (µm) 3508 x 2640 1754 x 1320 877 x 660 351 x 264 175 x 132
Spatial sampling2 (µm) 2.76 1.38 0.69 0.28 0.14
Optical resolution3 (µm) 2.76 1.38 0.69 0.30 0.24
Measurement time4 (s) >3

VSI

Vertical resolution5 (nm) 1
Maximum slope6 (º) 3 8 14 21 42

Other objectives available: Variable reflectance | Michelson | Mirau | Linnik

1 Maximum field of view with 2/3” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED.   4 10 μm scanning range.   5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.    6 On smooth surfaces, up to 86º on rough surfaces.

S onix

Interferometric

MAG 2.5X 5X 10X 20X 50X 100X
NA 0.075 0.13 0.30 0.40 0.55 0.70
WD (mm) 10.3 9.3 7.4 4.7 3.4 2.0
FOV1 (µm) 5040 x 3780 2520 x 1890 1260 x 945 630 x 472 252 x 189 126 x 94
Spatial sampling2 (µm) 7.88 3.94 1.97 0.98 0.39 0.19
Optical resolution3 (µm) 7.88 3.94 1.97 0.98 0.39 0.24
Measurement time4 (µm/s) 25

VSI

Vertical resolution5 (nm) 1
Maximum slope6 (º) 3 8 14 21 25 42

Other objectives available: Variable reflectance | Michelson | Mirau | Linnik

1 Maximum field of view with 2/3” camera and 0.375X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED.   4 Measurement speed 1X.   5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.    6 On smooth surfaces, up to 86º on rough surfaces.

Z performance

Z LINEAR SCALE
Vertical range 40 mm (1.6″)
Linearity <0.5 µm/mm
Resolution 2 nm

Software

S mart
User management rights Administrator, advanced operator, operator
Acquisition technologies Confocal, VSI and Focus Variation
Measurement types Image, 3D, 3D thickness, profile and coordinates
Advanced software analysis SensoMAP and SensoPRO
Remote control Software Development Kit (SDK) (optional)
S onix
User management rights Administrator, advanced operator, operator
Acquisition technologies VSI
Measurement types Image, 3D, 3D thickness
Advanced software analysis SensoMAP and SensoPRO
Remote control Software Development Kit (SDK) (optional)

Computer & Operating system

S mart
photoProduct_SMartComputerDimensions
Computer HP Z240SSF
Screen HP27i 2560×1440 px
Operating System Microsoft Windows 10, 64-bits
S onix
photoProduct_SonixComputerDimensions
Computer HP Z240SSF
Screen HP23i 1920×1080 px
Operating System Microsoft Windows 10, 64-bits
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