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Profiler technologies

Light sources

icon_BlueLight

460nm

icon_WhiteLight

580nm

Profiler dimensions

S lynx 2 specifications - Dimensions, options & accessories

Objective lenses

Brightfield
MAG 5X 10X 20X 50X 100X
NA 0.15 0.30 0.45 0.80 0.90
WD (mm) 20 15.8 3.0 1.0 2.0
FOV1 (µm) 2820 x 2820 1410 x 1410 700 x 700 280 x 280 141 x 141
Spatial sampling2 (µm) 2.76 1.38 0.69 0.27 0.13
Optical resolution3 (µm) 1.11 0.55 0.37 0.21 0.15

Confocal / Ai Focus Variation

Measurement noise4 (nm) 120 45 10 4 3
Maximum slope5 (º) 9 17 27 53 64
MAG 5X 10X 20X 50X 100X
System noise4 (nm) 120 45 10 4 3
Maximum slope5 (º) 9 17 27 53 64

1 Maximum field of view with 2/3” camera and 0.25X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED.   4 Measurement noise is measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment.   5 On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available.

Interferometry
MAG 2.5X 5X 10X 20X 50X 100X
NA 0.075 0.13 0.30 0.40 0.55 0.70
WD (mm) 10.3 9.3 7.4 4.7 3.4 2.0
FOV1 (µm) 5650 x 5650 2820 x 2820 1410 x 1410 700 x 700 280 x 280 140 x 140
Spatial sampling2 (µm) 5.52 2.76 1.38 0.69 0.27 0.07
Optical resolution3 (µm) 2.32 1.34 0.58 0.44 0.32 0.25

CSI

Measurement noise4 (nm) <5 nm
Maximum slope5 (º) 4 7 17 24 33 44
MAG 2.5X 5X 10X 20X 50X 100X
Measurement noise4 (nm) <5 nm
Maximum slope5 (º) 4 7 17 24 33 44

1 Maximum field of view with 2/3” camera and 0.25X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED.   4 Measurement noise is measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment.   5 On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available.

XYZ performance

XY
XY Motorized
Travel range (mm) 125 x 75
Z
Z Linear stage
Vertical range 20 mm
Resolution 5 nm

Accuracy and repeatability

Standard Value Uncertainty (U) Repeatability (σ) Technique
Step height (H) <10 µm U= (0.005 + H/50) μm <10 nm Confocal, AiFV & CSI
>10 µm U = (0.120 + H/120) μm >10 nm Confocal, AiFV & CSI
Areal roughness (Sa) 0.79 µm 40 nm 6 nm Confocal, AiFV & CSI

Values obtained in a VC-E vibration environment. Objective used
for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI 50X 0.55NA. Resolution 1024×1024
pixels. Extended uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (level
of confidence 95%). σ according to 25 measures.

Computer & Operating system

S lynx 2 - PC flexibility
Computer requirements Intel® Core™ i5/i7 Processor Ethernet connectivity,
minimum 1920 x 1080 display resolution
Operating System Microsoft Windows 10 or higher
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