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| Solutions >> MEMS |
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Related products:
· PLu 2300
· PLu 4300
· PLu neox
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| ACCELEROMETER |
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| High speed accelerometer. |
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| GYROSCOPE |
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Two dimensional gyroscope measured with a 5X objective in VSI mode. The field of view reaches 2 mm².
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| Si MEMBRANE |
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Si membranes are made from etched silicon of some hundreds of microns. The wall angle reaches 54 degree, and it is important to characterize its roughness.
Si etched membrane wall angle and roughness measured with 50X 0.95NA objective.
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| MICROMOTOR |
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| Micromotor coils measured with a 10X objective in VSI mode. |
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| PRESSURE SENSOR |
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| Pressure sensor array. 10X in VSI mode. FOV = 1 mm². |
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Sensofar-Tech, S.L.
T: +34 93 739 89 45
info@sensofar.com
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Fairs |
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CONTROL 2010
4. – 7.05.2010
Stuttgart, Germany
booth 1069 Hall 1
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OPTATEC 2010
15. – 18.06.2010
Frankfurt, Germany
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