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PLu 4300 - 3D Optical Profiler
Hight Resolution Thin Film Metrology |
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Sensofar launches the new PLu 4300, an optical profiler for the 3D measurement of surfaces and thin
films. The unique combination of Interferometry optical profiling (VSI vertical scanning interferometry, PSI phase shift interferometry) and Spectroscopic Reflectometry on the
same sensor head makes the 3D optical profiler PLu 4300 the only system in the market able to measure 3D profiles,
roughness and thickness of opaque and transparent materials with sub-nanometer resolution.
The optically integrated Spectroscopic Reflectometer opens an unprecedented combination of an optical
profiler and thin film measurement technology on
a single instrument. In the real world, White Light
interferometry is limited to measure thicknesses thicker than 500 nm. In contrast, Spectroscopic
Reflectometer is able to measure thicknesses from 10 nm with 0.1 nm of resolution in a tenth of a second.
Measurement on solar and power cells, ceramics (Energy), drug and hygiene coatings (Medical),
photoresist on masks, MEMs (Semiconductor), transmission, roughness or profile of aspherics (Optics),
RGB cells, photo spacers and defect analysis (FPD), etc. Now there is a cost-effective solution for all this
industries and applications.
•3D Optical Profiler and integrated Spectroscopic Reflectometry
• High power Dual-Led technology
• High Lateral Resolution (0.15 µm)
• Thickness with unprecedented resolution (0.1 nm)
• Fully integrated and easy-to-use in the same software
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Sensofar-Tech, S.L.
T: +34 93 700 14 92
info@sensofar.com
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Fairs |
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SPIE PHOTONICS WEST 2012
January 21-26, 2012
The Moscone Center
San Francisco, California, USA
More info> |
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MDM 2012
February 14-16, 2012
Anaheim Convention Center
Anaheim, CA, USA
More info> |
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MEDTEC EUROPE 2012
March 13-15, 2012
Messe Stuttgart
Stuttgart, Germany
More info> |
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CONTROL 2012
May 8-11, 2012
Messe Stuttgart
Stuttgart, Germany
More info> |
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