PLµ 2300

PLµ 2300

Optical Imaging Profiler

Sensofar has developed the optical imaging profiler PLµ 2300, a new Dual Technology sensor head combining Confocal and Interferometry techniques:

• You can choose between standard microscope imaging, confocal imaging, confocal profiling, PSI and VSI on a single instrument.
• This optical imaging profiler is the most complete and perfect tool for obtaining a fast non-invasive assessment of the micro - and nano - geometry of technical surfaces.
• It's suitable for multiple configurations: from the stand set-up for R&D and quality inspection laboratories, to the manipulator or robot-driven system for on-line process controls.
• PLµ 2300 - optical imaging profiler, offers a unique wide spectrum of applications: high contrast algorithms and an extremely high light efficiency for steep slopes, rough and low reflective surfaces or dissimilar materials, very smooth surfaces (optically polished).

Non-contact 3D based on Confocal and Interferometry
High speed Z scan (3 – 15 µm/s in interferometry and up to 400 µm/s in confocal))
High range of selection objectives (from 2.5X to 200X)
Long live BLUE LED light source.
Z measurement range from 0.1 nm to 24 mm.
Motorized and manual nosepiece with 5 or 6 objectives
High Z resolution (from 0.1 nm)
High local slope on smooth surfaces (up to 70º)
Field of view from 5 mm to 0.015 mm (larger with stitching)
Step Height accuracy < 0.8%
Step Height repeatability < 0.1%
Standard XY stage from 100x70 mm² to 300x300 mm²

Flexible Optical Sensor
The PLµ 2300 is an optical profiler, on which flexibility can hardly be beaten by any other system. Without any moving image scanning parts, this measuring head can be adapted to a column, a robot arm or other mechanical configurations and it enables to measure at various kinds of positions, non reachable by standard laboratory setups.

Multiple Technique
It is now possible to switch between standard light microscope and an optical profiler with both interferential and confocal technologies, using a simple software switch button. This optical profiler instrument combines all advantages of these two techniques without limitation to the capabilities of one technique.

No limitation of sample size
The PLµ 2300 compact, light and robust design does not have any limitations due to sample size. Adapt the sensor to any-size-stand you need, and measure large fields of view with the fully automated extended topography and extended profile capabilities of the PLµ series software.

Multiple Objective selection
The EPI objective series have short working distances and high numerical apertures, thus providing the high accuracy and performance of the optical measurement instrument. These objectives are specially suited for smooth and flat samples such as MEMs and ICs and for surfaces with steep local slopes, such as microlenses. The Super Long Working Distance (SLWD) series are ideal for the measurement of high aspect ratio structures, steeply sloping samples and large steps. The Extra Long Working Distance (ELWD) series are a halfway solution for the PLµ 2300.

Why confocal and Interferometry?
Interferometry is a well known optical profiling technology. Its advantages are high Z resolution not depending on the magnification used, and thus low magnifications are performing very well. In contrast, confocal has the disadvantage of being sensitive to NA, but has the advantage of having high numerical aperture and thus being able to profile high local slopes. For NA bigger than 0.8, the Z resolution is better than 2 nm, comparable to white light Interferometry and performing at the same level. The main advantage is that high magnification is only possible with confocal objectives.

PLµ 2300 covers the highest measurable surfaces by combining the low magnification interferential objectives (from 2.5X to 50X) and the high magnification confocal objectives (from 10X to 200X).