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CHARACTERISTICS
• Confocal, PSI (phase shift interferometry) and VSI (vertical scanning interferometry) profiling
• Standard microscope
imaging, confocal imaging and interferometry imaging
• Integrated high power
LED (l=480 nm)
• Z-scan device:
Open-loop 0.1 µm resolution motor stage Closed loop with
linear
encoders (optional) Additional closed loop PZT (optional)
• Digitized resolution:
user selectable, maximum
768x576 pixels
• Tip-tilt stage:recommended
for PSI (phase shift interferometry) and VSI (vertical scanning interferometry)
• Vibration-isolation system:
recommended for PSI (phase shift interferometry) and VSI (vertical scanning interferometry)
• Manual/motor XY stage
(>100x100 mm)
• XYZ joystick: fast and slow
positioning
• Computer system: latest version Pentium PC, 15-inch TFT
monitor
• PLµ software running under
MS Windows® XP®
• Input voltage: 100-120
VAC / 200-240 VAC / 50-60 Hz
• Power consumption: <150 W
• Sensor head dimensions (LxHxW):
210x340x190 mm
weight <5 Kg
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