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The PLµ 2300 has been designed as a modular system and many
different configurations can be supplied,
from the single sensor head for OEM applications to the most complete
and sophisticated arrangement.
Basic System
The basic operative setup comprises the sensor head and the
open-loop Z-scan device, which are mounted
on a standard breadboard. This configuration provides the
user with all the available imaging options (standard microscope,
confocal and interferometry), as well as the highest resolution
surface profiling techniques
(confocal, PSI and VSI). Thickness measurement as thin films and thick layers
is also possible. The highest quality EPI, ELWD, SLWD, DI
and TI Nikon objectives can be selected, with magnifications
from 2,5X to 150X. To operate the PLµ
2300 using PSI and VSI algorithms, upgrading the hardware setup
with a levelling tip-tilt stage and a vibration-isolation system
is strongly recommended.
+ XY Stage
The system can be upgraded with manual or motor X-Y stages,
which are very useful for handling the sample
and positioning the features to be measured within the field
of view. Using the X-Y motor stage option, the user can operate
the PLµ 2300 as a fully automated coordinate measurement
system. Also, extended profile and extended topography measurements
can easily be acquired using the stitching algorithms included
in the
software. A closed-loop PZT is also available as a high-accuracy
z-scan option. By means of this device,
the PLµ 2300 achieves sub-nanometer vertical resolution (with interferometry)
and calibration to traceable standards.
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Extended
Profile
Profiles up to 100 mm in length
(spherical lens of 20 mm)
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Coordinate
Single point non-connected measurement (progressive
ophthalmic lens)
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Extended topography
Topographies up to several mm2
(bumps on laser-irradiated silicon)
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