Measuring head adapted to a robot arm

Multiple Technique: Confocal and Interference
It is now possible to switch between standard light microscope and an optical profiler with both interferential and confocal technologies, using a simple software switch button. This optical profiler instrument combines all advantages of these two techniques without limitation to the capabilities of one technique.

Dual tecnology sensor

No limitation of sample size
The PLu 2300 compact, light and robust design does not have any limitations due to sample size. Adapt the sensor to any-size-stand you need, and measure large fields of view with the fully automated extended topography and extended profile capabilities of the PLu series software.

C3 Roughness Standard

Multiple Objective Options
The EPI objective series have short working distances and high numerical apertures, thus providing the high accuracy and performance of the optical measurement instrument. These objectives are specially suited for smooth and flat samples such as MEMs and ICs and for surfaces with steep local slopes, such as microlenses. The Super Long Working Distance (SLWD) series are ideal for the measurement of high aspect ratio structures, steeply sloping samples and large steps. The Extra Long Working Distance (ELWD) series are a halfway solution for the PLu 2300.

Objective 50XSLWD/ELWD

Objective 2.5 XTI

Advantages of the PLu Confocal Technology
Repeatability figures better than 5nm, the highest achievable lateral resolution by a white light optical profiler (spatial sampling of 0.18 µm), steep slopes on smooth surfaces (up to 51º) and step height measurements made on dissimilar materials are some of the advantages of confocal technology, which in combination with the compatibility to interference techniques provide a unique wide spectrum of applications for an optical measurement instrument.

Confocal profiling

Advantages of the Interference Technology
Vertical resolution down to 0.1nm is also possible for the smoothest surfaces. By a simple software switch button and using interferometry objectives, the PLu is ready to offer the advantages of the Interferometry.

	VSI Profiling
	PSI Profiling

PLu OEM Version
With the external control software package, the optical measurement instrument PLu 2300 OEM Version is the perfect tool to include this technology in a wide range of OEM applications. Control our instrument from your own system through simple, but robust communication protocol.