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Measurement
and Analysis
After data acquisition Critical Dimensions can be obtained and
step height measurements can be made. Using Term removal functions,
profiles and topographies can be levelled and local curvature
radius easily measured. As an example (left) a spherical term
has been removed from a microlens profile.
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Term
removal
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Filtering of the profiles provides standard statistical parameters
for roughness and waviness. PLu data can be exported as ASCII or
raw files
that can be processed with most standard software packages.
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Statistical
parameters |
Powered by OpenGL®
3D surfaces measured with confocal profiling
can be observed from different viewpoints. OpenGL®
three-dimensional graphics allows navigation through the acquired
topography, and the surface can be rotated, moved and scaled
just dragging the mouse. The combination of lighting effects
and different colour scales offers a quasi-photographic impression.
Axes can be disabled to increase the effective viewable area.
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3D
View |
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Software
Acquisition
(confocal profiling technique)
• 2D & 3D scanning
• Real time XYZ position
• Easy to focus & find the area
of interest
• Macro function for repetitive measurements
Data Analysis
• Surface leveling
• Term removal
• Data filtering (Median, Harsh, Sobel, Prewitt, FFT,
Low Pass
and High Pass)
• Roughness & Waviness filtering (2RC and Gaussian)
• Roughness & Waviness parameters (ASME and DIN standards)
• Data interpolation for
non-measured points
Display
• 3D view (powered by
OpenGL®)
• Contour and Profile display
• Histogram and Bearing Area
• DIC simulation
• Data export and Printable reports
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