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Basic
System
The basic configuration includes a manual XY stage and allows
Single and Multiple Profiles to be measured
within the field of view of the selected objective. This configuration is also valid for the measurement of thin
films and thin layers.
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Single Profile
Very high aspect ratio groove
(Nd YAG drilled on a gold substrate).
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Multiple Profile
Up to 35 parallel single
profiles within
the field of view (pressure micro-sensor).
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+ XY Stage
Adding a motorized XY stage, the PLµ can also measure
Coordinates and Extended Profiles up to 100 mm.
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Extended
Profile
Profiles up to 100 mm. Roughness and
waviness measurements (excimer laser
ablation on plexiglass substrate).
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Coordinate
Spherical Term removal
(progressive ophtalmic lens)
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+ PZT
A PZT scanning device can also be incorporated to the basic
configuration in order to obtain high contrast Confocal Images
and 3D Topographies within the field of view of the selected
objective.
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Confocal
Image
High depth-discrimination
confocal image (IC).
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Topography
F ast data acquisition
(3D view pressure micro-sensor).
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Extended Topography
Topographies up to several mm2
(one dime coin)
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