• A perfect tool for obtaining a fast non - invasive assessment of the
micro -or nano- geometry of technical surfaces, such as ICs, MEMs,
microlenses, etc.

• This confocal imaging profiler is suitable for use in R&D and quality applications as well as in production environments.

• In comparison with other optical profilers, the PLµ is more light
efficient, making it possible to measure low reflective surfaces even with steep local slopes. As confocal imaging profiler, the PLµ provides the highest depth of focus discrimination.