S neox Non-contact 3D Surface Profiler

Granite Stage
Adjustable Column
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Technologies

icon_Confocal_rgb_80x80

Confocal

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Interferometry

PSI | ePSI | VSI

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Focus Variation

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Spectroscopic Reflectometry
OPTIONAL

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Light sources

icon_RedLight

630nm

icon_GreenLight

530nm

icon_BlueLight

460nm

icon_WhiteLight

550nm

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Dimensions

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Base & Column

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Base & Adjustable Column

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Controller

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Objectives performance

Brightfield
tableObj_BF_SneoxOnly

Confocal

tableObj_Confocal_Z_NotSlynx

Focus Variation

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Other objectives available: Water Immersion | Super Long Working Distance | Extra Long Working Distance | Collar Ring Depth Focusing Correction

1 Maximum field of view with 2/3” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED.   4 For confocal, 21 scanning planes.   5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.   6 On smooth surfaces, up to 86º on rough surfaces.

Interferometric
tableObj_Int_SneoxOnly

PSI / ePSI / VSI

tableObj_Int_Z_SneoxOnly

Other objectives available: Variable reflectance | Michelson | Mirau | Linnik

1 Maximum field of view with 2/3” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED.   4 10 μm scanning range.   5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For PSI, 10 phase averages with vibration isolation activated. The 0.01 nm are achieved with Piezo stage scanner and temperature controlled room.    6 On smooth surfaces, up to 86º on rough surfaces.

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XYZ performance

XY
tableStage_XY_SneoxOnly
Z
tableStage_Z_SneoxOnly
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Computer & Operating system

photoProduct_SmartComputerDimensions
Computer HP Z240SSF
Screen HP27i 2560×1440 px
Operating System Windows 8, 64 bits
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