S lynx - Compact 3D Surface Profiler

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Why 3 in 1 technologies?

Designed as a high-performance 3D optical profiler from the outset, S neox outperforms all existing optical profilers, combining 3 techniques – confocal (best for surfaces with high slope), interferometry (yields the highest vertical resolution) and Focus Variation (measure shape in mere seconds) – in the same sensor head without any moving parts.

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Confocal profilers have been developed for measuring smooth to very rough surfaces. Confocal profiling provides the highest lateral resolution that can be achieved by an optical profiler. Thus, spatial sampling can be reduced to 0.01 μm, which is ideal for critical dimension measurements. High NA (0.95) and magnification (150X) objectives are available to measure smooth surfaces with steep local slopes over 70° (for rough surfaces up to 86°). The proprietary confocal algorithms provide the unique vertical repeatability on the nanometer scale.

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White-light vertical scanning interferometry (VSI) is a widely used and powerful technique for measuring surface characteristics such as topography or transparent film structure. It is best suited for measuring smooth to moderately rough surfaces, and provides nanometer vertical resolution regardless of the objective’s NA or magnification.

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Focus Variation

Focus Variation is an optical technology that has been developed for measuring the shape of large rough surfaces. This technology is based on Sensofar’s extensive expertise in the field of combined confocal and interferometric 3D measurements, and is specifically designed to complement confocal measurements at low magnification. Highlights of the technology include high slope surfaces (up to 86°), highest measurement speeds (mm/s) and large vertical range. This combination of measurement capabilities is mainly used for tooling applications.

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