S mart & S onixIn-line 3D Surface Sensors

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Technologies

S mart
icon_Confocal_rgb_128x128

Confocal

icon_Interferometry_rgb_128x128

Interferometry
VSI

icon_FocusVariation_rgb_128x128

Focus Variation

S onix
icon_Interferometry_rgb_128x128

Interferometry
VSI

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Light Source

icon_Lightsource
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Dimensions

S mart
photoProduct_SmartSensorhead
photoProduct_SmartControllerDimensions
S onix
photoProduct_SonixSensorheadDimensions
photoProduct_SonixControllerDimensions
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Objective performance

S mart

Brightfield

tableObj_BF_NotSneox

Confocal

tableObj_Confocal_Z_NotSlynx

Focus Variation

tableObj_FV

Other objectives available:  Water Immersion | Super Long Working Distance | Extra Long Working Distance | Collar Ring Depth Focusing Correction

1 Maximum field of view with 2/3” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED.   4 For brightfield objectives, 21 scanning planes (confocal).   5 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis.   6 On smooth surfaces, up to 86º on rough surfaces.

Interferometric

VSI

tableObj_IntVSI_Z_SmartOnly

Other objectives available:  Variable reflectance | Michelson | Mirau | Linnik

1 Maximum field of view with 2/3” camera and 0.5X optics.   2 Pixel size on the surface.   3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED.   4 For interferometric objectives, 10 µm scanning range.   5 System noise measured as the difference between two consecutive measurements on a calibration mirror placed perpendicular to the optical axis.   6 On smooth surfaces, up to 86º on rough surfaces.

S onix

Interferometric

tableObj_Int_SonixOnly

VSI

tableObj_IntVSI_Z_SonixOnly

1 Maximum field of view with 1/3” camera and 0.375X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED. Spatial sampling could limit the optical resolution. 4 Measurement speed 1X. 5 System noise measured as the difference between two consecutive measurements of a callibration mirror placed perpendicular to the optical axis. 6 On smooth surfaces.

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Z Stage performance

tableStage_Z_NotSneox
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Software

S mart
tableSoftware_Smart
S onix
tableSoftware_Sonix
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Computer & Operating system

S mart
photoProduct_SMartComputerDimensions
Computer HP Z230SSF with 2560×1440 px HP27i Display
Operating System Windows 8, 64 bit
S onix
photoProduct_SonixComputerDimensions
Computer HP Z230SSF with 1920×1080 px HP23i Display
Operating System Windows 8, 64 bit
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