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Confocal Tracking,
a new patented technology

The measurement principle is based on Sensofar’s proprietary algorithm Confocal Tracking. Using structured illumination and a
high NA microscope objective, a very precise determination of sample focus can be achieved.

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How does it work?

Once precise focus has been determined, the sample is moved along the horizontal axis while the sensor head executes a coordinate move along the vertical axis to keep the sample in focus using a closed-loop algorithm. The sample profile is reconstructed by combining the movement of the horizontal and vertical axes.

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Tracking errors
simultaneously corrected

Even the best and fastest closed-loop systems exhibit a residual tracking error. This error can be acceptable if the goal is just to keep a sample within the depth of focus, but it can be too high when form measurements at the nm-level are being pursued. The Confocal Tracking technology makes it possible to overcome this aspect by taking advantage of the image-based approach to correct residual tracking errors.

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Accurate results

The form measurements obtained with this approach are much more accurate than those obtained with single-
point-based techniques, as the representation of the surface is composed entirely of in-focus points. Making the
comparison with a contact system, it would be as if all the points had been acquired under conditions of optimal
contact between the tip of the stylus and the surface.

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